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Lecturer(s)
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Berka Milan, doc. Ing. Ph.D.
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Course content
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1) Classification of semiconductor materials - intrinsic, non-intrinsic, compound semiconductors, amorphous, polycrystalline, monocrystalline semiconductors, atomic and crystal structure, properties of semiconductor materials (electrical, mechanical, chemical, thermal), band models, direct and indirect semiconductors, degenerate and ungeared 2) Parameters and properties of semiconductor materials - channel length, channel width, threshold voltage, resistance 3) Physical phenomena in semiconductor materials - currents, mobility, recombination, diffusion, piezoresistivity, optical properties, life time, Seebek effect, Hall effect 4) Contact phenomena of semiconductor materials - Schottky contact, ohmic contact 5) Disorders of semiconductor materials and structures - classification, detection, ESD 6) Measurement on semiconductors - electric, optical 7) Production technology of semiconductor structures - preparation of materials (wafer), masking process, oxidation process, selective diffusion, etching, plating (thin layers), wafer separation, MOS and TTL technology, clean rooms 8) The limits of integration 9) Contacting and encapsulation of semiconductor structures, cooling 10) Special semiconductor devices 11) MEMS technology 12) Semiconductor materials for power and high frequency applications 13) Optical phenomena in semiconductors
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Learning activities and teaching methods
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Laboratory work, Lecture
- Practical training (number of hours)
- 13 hours per semester
- Contact hours
- 26 hours per semester
- Graduate study programme term essay (40-50)
- 40 hours per semester
- Preparation for an examination (30-60)
- 30 hours per semester
- Preparation for laboratory testing; outcome analysis (1-8)
- 4 hours per semester
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| prerequisite |
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| Knowledge |
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| to describe basic parameters and properties of materials |
| to describe the construction of basic semiconductor components |
| to calculate the values of electrical quantities |
| to display measured values in graphs |
| Skills |
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| to measure basic electrical quantities |
| to connect a simple electrical circuit |
| to operate simple and complex measuring instruments |
| to create a report from laboratory measurements |
| Competences |
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| N/A |
| learning outcomes |
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| Knowledge |
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| to identify important parameters and properties of semiconductor materials |
| to describe the behavior of semiconductor devices in circuitry |
| to clarify important phenomena of semiconductor materials |
| to explain physical principles of semiconductor materials |
| to describe the technological processes of semiconductor device manufacturing |
| Skills |
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| to apply theoretical knowledge in practical implementations |
| to realize basic and more complex measurements of semiconductor materials |
| to create a professional report from measurements |
| Competences |
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| N/A |
| N/A |
| teaching methods |
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| Knowledge |
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| Lecture |
| Laboratory work |
| One-to-One tutorial |
| Self-study of literature |
| Skills |
|---|
| Laboratory work |
| Lecture |
| Individual study |
| Competences |
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| Lecture |
| Laboratory work |
| assessment methods |
|---|
| Knowledge |
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| Combined exam |
| Test |
| Seminar work |
| Individual presentation at a seminar |
| Skills |
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| Skills demonstration during practicum |
| Individual presentation at a seminar |
| Competences |
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| Skills demonstration during practicum |
| Combined exam |
| Test |
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Recommended literature
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Ivan Hüttel. Technologie materiálů pro elektroniku a optoelektroniku. VŠCHT Praha, 2000. ISBN 8070803878.
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Kasap, S. O. Principles of electronic materials and devices. 3rd ed. Boston : McGraw-Hill, 2006. ISBN 0-07-124458-1.
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Schroder, Dieter K. Semiconductor material and device characterization. 3rd ed. Hoboken : John Wiley & Sons, 2006. ISBN 0-471-73906-5.
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Sze, S. M.; Ng, Kwok K. Physics of semiconductor devices. 3th ed. Hoboken : Wiley-Interscience, 2007. ISBN 978-0-471-14323-9.
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Yoshio Nishi. Handbook of Semiconductor Manufacturing Technology. CRC Press, 2008. ISBN 978-157444-675-3.
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